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MINT! ANGSTROM EVOVAC DEPOSITION SYSTEM / THERMAL EVAPORATOR W/ VAC GLOVEBOXES Orange County Machinery

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SKU: mode_1813521727599 Category: GLOVE BOX Tags: GLOVE BOX, LAB EQUIPMENT

Description
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MINT! ANGSTROM EVOVAC DEPOSITION SYSTEM / THERMAL EVAPORATOR W/ VAC GLOVEBOXES

REF # (OC2189)

MINT! 2008 ANGSTROM EVOVAC VACUUM DEPOSITION SYSTEM / THERMAL EVAPORATOR WITH (2) INTEGRATED VAC OMNI-LAB MODEL 101865 GLOVEBOXES AND (1) CUSTOM BOX FOR EVOVAC UN-LOADING.. PLUS VACUUM PUMPS, CRYO COMPRESSOR, MOLECULAR SIEVES SPARES, CHILLER, MANUALS, COMPUTER AND MONITOR, AND MUCH MORE!

$300K REPLACEMENT COST.

The Angstrom Engineering EVOVAC is a combination electron beam evaporator and thermal evaporator used to deposit Ti, Cr, Au, Al, Ni, Pt, Ag, Cu, Pd, Ge, Al2O3, SiO2, Ta, Mo and TiO2 with the ability to heat the substrates and do in-situ substrate cleaning using an ion mill. It is an open loop box coater with a dome that can run multiple wafers and substrates in each run.

All the e-beam evaporators in the LNF are setup using small point sources and long throw distances that lead to very directional deposition with minimal heat transfer. The “line of sight” nature means that evaporated films have poor gap fill but make the tool ideal to use for lift-off applications. The evaporators in the LNF use thin films controllers with quartz crystal monitor feedback. These controllers pre-heat the source materials with the shutter closed. Then, during deposition, the controller uses the feedback from the crystal monitor and varies the e-beam or thermal power to maintain a steady, preset deposition rate and to determine the total evaporation thickness.

Contents
1 Announcements
2 Capabilities
3 System Overview 3.1 Hardware Details
3.2 Substrate Requirements
3.3 Material Restrictions

4 Supported Processes
5 Standard Operating Procedure
6 Checkout Procedure
7 Maintenance 7.1 Tool Pumping Performance
7.2 Process Characterization
7.3 Power Bump Recovery

Announcements
6/15/18 Updated deposition tables and available films.
Needs detailed SOP – expect by Fall 2018

Capabilities
Multi-wafer lift-off evaporator Medium deposition rate (1-5 Å/sec) metal and dielectric films on multiple wafers
Designed for low heat transfer and minimal sidewall coverage for liftoff applications
Stacks of multiple films can be run

System Overview

Hardware Details
Cryo-pumped box coater capable of low 10-7 Torr base pressure in 1 hr of pumping
Reactive gasses or heating up to 250C.
8x15cc pocket E-beam gun and 2 thermal sources to allow 10 different materials to be deposited in one run
Large distance from source and curved substrate dome designed for lift-off applications
Dome rotation and curved uniformity plate to allow for better uniformity

Substrate Requirements
2”, 3”, 4” and 6” wafer holders available as well as clip fixtures for smaller pieces
Tool holds 4×4” or 4×6” wafers or 4×6″ fixtures.

Material Restrictions

The Angstrom Engineering Evovac Evaporator is designated as a Metals class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email [email protected] for any material requests or questions.

Approved materials

Dielectric##Aluminum Oxide
##Fused Silica
##Pyrex
##Silicon Oxide/Nitride/Poly (Clean thermal, LPCVD)
##Silicon Dioxide/Nitride (clean LTO)
##Silicon Dioxide (S6T1 dirty thermal)
##Silicon Dioxide (Sputtered)
##Silicon Oxide/Nitride/Amorphous (P5000)
##Silicon Oxide/Nitride (GSI)
##Silicon Oxide/Nitride/Amorphous (Plasmatherm)
##Titanium Dioxide
##Tantalum Oxide
Semiconductor##Silicon
##In-situ doped Poly-Si (n type)
##In-situ doped Poly-Si (p type)
##Silicon Dioxide/Poly (Dirty LPCVD/LTO S6T3-4)
##Germanium
##Aluminum Nitride
##Gallium Oxide
Metal##Chrome
##Nickel
##Nickel Chrome
##Gold
##Platinum
##Silver
##Tantalum
##Titanium
##Tungsten
##Tungsten/Titanium
##Aluminum
##Copper
##Iron
##Indium
##Iridium
##Moly
##Palladium
##Tin
##Zinc
##Indium Tin Oxide
##Zinc Oxide
Polymer##KMPR
##PDMS
##Polyimide
##SPR 220
##SU-8
##PR – 1800
##PR 9260
##Parylene

Supported Processes
Angstrom Engineering Films:

Material

E-beam Pocket
E-beam Max thickness
E-beam Max Deposition Rate
Thermal Max thickness
Thermal Deposition Rate
Titanium (Ti) 1 1 µm 10 Å/sec TBD TBD
Chromium (Cr) 2 5000 Å 5 Å/sec N/A N/A
Nickel Ni 3 5000 Å 5 Å/sec N/A N/A
Gold (Au) 4 1 µm 7 Å/sec TBD TBD
Aluminum (Al) 5 1 µm 10 Å/sec 2000 Å 2 Å/sec
Platinum (Pt) 6 2000 Å 5 Å/sec N/A N/A
Palladium Pd 6 5000 Å 5 Å/sec 200 Å 1 Å/sec
Silver Ag 7 1 µm 10 Å/sec 2000 Å 2 Å/sec
Copper Cu 7 or 8 1 µm 5 Å/sec 200 Å 1 Å/sec
Tantalum Ta 7 5000 Å 3 Å/sec N/A N/A
Molybdenum Mo 7 500 Å 1 Å/sec N/A N/A
GermaniumGe 8 5000 Å 5 Å/sec N/A N/A
Alumina Al2O3 8 2000 Å 5 Å/sec N/A N/A
Silicon Dioxide SiO2 8 5000 Å 5 Å/sec N/A N/A
Titanium Dioxide TiO2 7 or 8 5000 Å 5 Å/sec N/A N/A

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Prompt shipping and expert packing

Because of our long-standing partnership in a long-standing partnership with UPS, FedEx, DHL as well as a range of other top global carriers we can provide various shipping options. Our warehouse staff are highly trained to package your goods exactly as per the specifications we offer. Your goods are thoroughly checked and secured properly prior to shipping. Each day, we ship to thousands of customers across different countries. This is an indication of our dedication to being the largest online retailer worldwide. Both Europe as well as the USA have distribution and warehouse centres.

Note: Orders containing multiple items will have a distinct processing period for each item.

We will thoroughly inspect all products before they are shipped. Most orders are shipped within 48 hours. The delivery estimate is 3 to 7 days.

Returns

The stock is dynamic and we cannot control it completely because several parties are involved, including our factory and warehouse. The actual inventory can fluctuate at any time. It's possible that the stocks could be depleted after the order has been made.

Our policy is for 30 days. If it's been more 30 days since the date you purchased your item We're sorry to say that we can't offer you a complete refund or exchange.

You are able to return an item in the event that it is not used and in the same state as when you received it. You must have the item in its original packaging.